Porous Silicon: A Resourceful Material for Nanotechnology

被引:15
作者
Betty, Chirayath A. [1 ]
机构
[1] Bhabha Atom Res Ctr, Div Chem, Bombay 400085, Maharashtra, India
关键词
Biocompatibility; biodegradability; optoelectronic applications; nanostructured materials; nanotechnology applications; chemical sensor applications; physical sensor applications; biosensor applications; biomaterials; drug delivery; porous silicon and electrical properties;
D O I
10.2174/187221008784534514
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Nanostructured materials possess better tunability of their properties by varying their crystallite size compared to their bulk counterparts. These properties have opened up new avenues for fabricating highly sensitive, miniaturized and cost effective devices. Some of the drawbacks of these materials can be overcome by band gap engineering and/or making composites or core shell structures. Porous silicon obtained by electrochemical etching of polished silicon is a versatile material for nanotechnology applications due to its tunable pore size, porosity, thermal and mechanical properties, optical and electrical properties, biocompatibility, biodegradability, and most importantly, compatibility with microelectronics. This article gives an overall view of the various applications of porous silicon in nanotechnology.
引用
收藏
页码:128 / 136
页数:9
相关论文
共 41 条
[1]   The use of nanocrystals in biological detection [J].
Alivisatos, P .
NATURE BIOTECHNOLOGY, 2004, 22 (01) :47-52
[2]  
ANCA A, 2003, REV ADV MATER SCI, V5, P440
[3]  
ASTON R, 2004, Patent No. 1309309
[4]   AN EXPERIMENTAL AND THEORETICAL-STUDY OF THE FORMATION AND MICROSTRUCTURE OF POROUS SILICON [J].
BEALE, MIJ ;
BENJAMIN, JD ;
UREN, MJ ;
CHEW, NG ;
CULLIS, AG .
JOURNAL OF CRYSTAL GROWTH, 1985, 73 (03) :622-636
[5]   Dielectric filters made of PS: Advanced performance by oxidation and new layer structures [J].
Berger, MG ;
ArensFischer, R ;
Thonissen, M ;
Kruger, M ;
Billat, S ;
Luth, H ;
Hilbrich, S ;
Theiss, W ;
Grosse, P .
THIN SOLID FILMS, 1997, 297 (1-2) :237-240
[6]   Macroporous silicon based capacitive affinity sensor-fabrication and electrochemical studies [J].
Betty, CA ;
Lal, R ;
Sharma, DK ;
Yakhmi, JV ;
Mittal, JP .
SENSORS AND ACTUATORS B-CHEMICAL, 2004, 97 (2-3) :334-343
[7]  
CANHAM L, 2000, Patent No. 1098957
[8]  
CANHAM LT, 1997, EMIS DATA REV SERIES, P30
[9]  
CHIN VI, 2004, Patent No. 20046734000
[10]   The structural and luminescence properties of porous silicon [J].
Cullis, AG ;
Canham, LT ;
Calcott, PDJ .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (03) :909-965