Reliable fabrication technologies for optical resonant filters

被引:3
作者
Rabady, R [1 ]
Avrutsky, I [1 ]
机构
[1] Wayne State Univ, Dept Elect & Comp Engn, Detroit, MI 48202 USA
关键词
D O I
10.1364/AO.42.004499
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A reliable technology for optical resonant filters can be useful for optoelectronics technologies, optical communications systems, and biomedical applications. Positioning the resonance at a specific target wavelength is challenging because of the sensitivity of placing a narrow spectral filtering window to the error factors that are associated with the fabrication and characterization processes. We describe and prove experimentally two fabrication approaches to overcome this challenge. (C) 2003 Optical Society of America.
引用
收藏
页码:4499 / 4504
页数:6
相关论文
共 20 条
  • [1] [Anonymous], 1994, The Optical Constants of Bulk Materials and Films
  • [2] Auciello O., 2001, In Situ Real-Time Characterization of Thin Films
  • [3] Avrutskii I. A., 1986, Soviet Journal of Quantum Electronics, V16, P1558, DOI 10.1070/QE1986v016n11ABEH008402
  • [4] Avrutskii I. A., 1986, Soviet Journal of Quantum Electronics, V16, P1063, DOI 10.1070/QE1986v016n08ABEH007239
  • [5] Waveguide grating mirror for large-area semiconductor lasers
    Avrutsky, I
    Rabady, R
    [J]. OPTICS LETTERS, 2001, 26 (13) : 989 - 991
  • [6] AVRUTSKY I, 2002, DIFFR OPT MICR M DOM
  • [7] Normal-incidence guided-mode resonant grating filters: Design and experimental demonstration
    Brundrett, DL
    Glytsis, EN
    Gaylord, TK
    [J]. OPTICS LETTERS, 1998, 23 (09) : 700 - 702
  • [8] PREPARATION OF SUBOXIDES IN TI-O SYSTEM BY REACTIVE SPUTTERING
    GERAGHTY, KG
    DONAGHEY, LF
    [J]. THIN SOLID FILMS, 1977, 40 (JAN) : 375 - 383
  • [9] HESEL A, 1965, APPL OPTICS, V4, P1275
  • [10] High-efficiency guided-mode resonance filter
    Liu, ZS
    Tibuleac, S
    Shin, D
    Young, PP
    Magnusson, R
    [J]. OPTICS LETTERS, 1998, 23 (19) : 1556 - 1558