Nanometer resolution of three-dimensional motions using video interference microscopy

被引：35

作者：

Hemmert, W ^{[1
]}

Mermelstein, MS ^{[1
]}

Freeman, DM ^{[1
]}

机构：

[1] MIT, Elect Res Lab, Cambridge, MA 02139 USA

来源：

MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 1999年

关键词：

D O I：

10.1109/MEMSYS.1999.746842

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

An interferometric video system for measuring microelectromechanical systems (MEMS) with nanometer resolution is demonstrated. Interferograms are generated by combining light reflected from the target with light reflected from a reference mirror. Motions are determined from sequences of stop-action interferograms obtained with stroboscopic illumination. The system was used to measure microfabricated accelerometer. In-plane motions were determined by analysis of brightfield images using gradient methods with subpixel resolution. Results are compared for brightfield images obtained by blocking light from the reference arm of the interferometer and for brightfield images reconstructed from interferograms. Out-of-plane motions are determined by analyzing interferograms obtained with different positions of the reference mirror. Results demonstrate nanometer resolution of in-plane motions and subnanometer resolution of out-of-plane motions.

引用

页码：302 / 308

页数：7

共 8 条

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