New method for fabrication of an array of individually controllable miniaturized electrostatic lenses

We have fabricated arrays of silicon membranes and structures such as silicon contact pads and interconnecting silicon-wires on borosilicate glass as carrier material and isolator. We propose a new method to align and assemble these basic modules to form electrostatic electron optical components such as lenses and multipoles. This enables the fabrication of arrays of mutually aligned e-beam microcolumns.