Simple fabrication of cylindrical sol-gel microlens array by reflowing technique

被引：4

作者：

He, M ^{[1
]}

Yuan, XC ^{[1
]}

Ngo, NQ ^{[1
]}

Cheong, WC ^{[1
]}

Bu, J ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore

来源：

OPTICAL ENGINEERING | 2003年 / 42卷 / 08期

关键词：

sol-gels; microlens arrays; S1O(2)/ZrO2; reflowing;

D O I：

10.1117/1.1591195

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this paper, we report the fabrication of a 128- X 1024-element cylindrical microlens array in a low-cost inorganic-organic SiO2/ZrO2 sol-gel glass using reflowing technique. The fabricated microlens array had excellent surface smoothness and dimension uniformity. The prime advantages of the hybrid sol-gel material are its suitability as an etching-free negative-tone UV-sensitive material, uniformity, and other excellent optical properties. Microfabrication in sol-gel glass using the reflowing technique is demonstrated as a cost-effective and high-volume production technology for micro-optical elements. (C) 2003 Society of Photo-Optical Instrumentation Engineers.

引用

页码：2180 / 2181

页数：2

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