Vibrations of free and surface-coupled atomic force microscope cantilevers: Theory and experiment

被引:578
作者
Rabe, U
Janser, K
Arnold, W
机构
[1] Fraunhofer Inst. for Nondestr. Test., University
关键词
D O I
10.1063/1.1147409
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
With an optical interferometer, the free vibration spectra and the local, vibration amplitude of four rectangular atomic force microscope cantilevers made of silicon have been examined experimentally in a spectral range of 100 kHz to 10 MHz. A good agreement with the flexural wave theory of elastic beams was found. Coupling to torsional vibrations was also observed. When the sensor tip of the cantilever is in contact with a sample surface the resonances are shifted in frequency and the vibration amplitudes along the cantilever change. A method is presented to calculate this frequency shift using a linear approximation for the tip-sample interaction forces, and the results are compared with the frequency shift calculated from the point-mass model. The measured resonance frequencies' of a surface-coupled cantilever do not correspond as well to the theoretical ones as in the free case even if the elastic-beam model is used. The reason for the disagreement is found to be the geometry of the commercial cantilevers and the nonlinearity of the tip-sample interaction force. (C) 1996 American Institute of Physics.
引用
收藏
页码:3281 / 3293
页数:13
相关论文
共 32 条
  • [1] ATOMIC FORCE MICROSCOPE
    BINNIG, G
    QUATE, CF
    GERBER, C
    [J]. PHYSICAL REVIEW LETTERS, 1986, 56 (09) : 930 - 933
  • [2] BORCHERS H, 1964, LANDOLTBORNSTEIN ZAH, V4
  • [3] CALCULATION OF THERMAL NOISE IN ATOMIC-FORCE MICROSCOPY
    BUTT, HJ
    JASCHKE, M
    [J]. NANOTECHNOLOGY, 1995, 6 (01) : 1 - 7
  • [4] RESONANCE RESPONSE OF SCANNING FORCE MICROSCOPY CANTILEVERS
    CHEN, GY
    WARMACK, RJ
    THUNDAT, T
    ALLISON, DP
    HUANG, A
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (08) : 2532 - 2537
  • [5] SCANNING MICRODEFORMATION MICROSCOPY
    CRETIN, B
    STHAL, F
    [J]. APPLIED PHYSICS LETTERS, 1993, 62 (08) : 829 - 831
  • [6] CRETIN B, 1984, P IEEE ULTR S, P656
  • [7] DYNAMIC FORCE MICROSCOPY IN LIQUIDS
    DREIER, M
    ANSELMETTI, D
    RICHMOND, T
    DAMMER, U
    GUNTHERODT, HJ
    [J]. JOURNAL OF APPLIED PHYSICS, 1994, 76 (09) : 5095 - 5098
  • [8] ELINGS VB, 1993, Patent No. 5266801
  • [9] HIRSEKORN S, COMMUNICATION
  • [10] MEASUREMENT OF THE MODAL SHAPES OF INHOMOGENEOUS CANTILEVERS USING OPTICAL BEAM DEFLECTION
    JENKINS, DFL
    CUNNINGHAM, MJ
    CLEGG, WW
    BAKUSH, MM
    [J]. MEASUREMENT SCIENCE AND TECHNOLOGY, 1995, 6 (02) : 160 - 166