Effect of fabrication errors in channel waveguide Bragg gratings

被引:19
作者
Coppola, G
Irace, A
Cutolo, A
Iodice, M
机构
[1] Univ Naples Federico II, Dept Elect Engn, I-80125 Naples, Italy
[2] CNR, Ist Ric Electtromagnetismo & Componenti Elettron, I-80124 Naples, Italy
关键词
D O I
10.1364/AO.38.001752
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The spectral performances of nonideal rectangular Bragg gratings, integrated in a rib waveguide, are analyzed by a multilayer approach based on the effective-index method. The effects of errors on the photolithographic definition of the grating, that is, period and shape, and of errors on the central of etching depth are investigated. Also the influence of the stitching error, which is unavoidable when the grating is realized by means of electron-beam photolithography, is addressed. A novel analytical approach that extends coupled-mode theory to the analysis of real gratings is also presented. (C) 1999 Optical Society of America.
引用
收藏
页码:1752 / 1758
页数:7
相关论文
共 26 条
[1]   RANDOM FLUCTUATIONS IN 1ST-ORDER WAVEGUIDE GRATING FILTERS [J].
BASU, A ;
BALLANTYNE, JM .
APPLIED OPTICS, 1979, 18 (15) :2575-2579
[2]   HIGH-EFFICIENCY BINARY FAN-OUT GRATINGS BY MODULATION OF A HIGH-FREQUENCY CARRIER GRATING [J].
BLAIR, P ;
TAGHIZADEH, MR ;
PARKES, W ;
WILKINSON, CDW .
APPLIED OPTICS, 1995, 34 (14) :2406-2413
[3]   An electrically controlled Bragg reflector integrated in a rib silicon on insulator waveguide [J].
Cutolo, A ;
Iodice, M ;
Irace, A ;
Spirito, P ;
Zeni, L .
APPLIED PHYSICS LETTERS, 1997, 71 (02) :199-201
[4]  
Eisert D, 1996, APPL PHYS LETT, V68, P599, DOI 10.1063/1.116480
[5]   HIGH-TEMPERATURE OPERATION OF CIRCULAR-GRATING SURFACE-EMITTING DBR LASERS FABRICATED ON AN INGAAS/GAAS STRUCTURE [J].
FALLAHI, M ;
DION, M ;
CHATENOUD, F ;
TEMPLETON, IM ;
BARBER, R .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1994, 6 (03) :326-329
[6]   COMPARISON OF 2 APPROACHES TO THE WAVEGUIDE SCATTERING PROBLEM - TM POLARIZATION [J].
GRUHLKE, RW ;
HALL, DG .
APPLIED OPTICS, 1984, 23 (01) :127-133
[8]   INVESTIGATION ON THE SPECTRAL CHARACTERISTICS OF DFB LASERS WITH DIFFERENT GRATING CONFIGURATIONS MADE BY ELECTRON-BEAM LITHOGRAPHY [J].
KJELLBERG, T ;
NILSSON, S ;
KLINGA, T ;
BROBERG, B ;
SCHATZ, R .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 1993, 11 (09) :1405-1415
[9]   THE EFFECT OF STITCHING ERRORS ON THE SPECTRAL CHARACTERISTICS OF DFB LASERS FABRICATED USING ELECTRON-BEAM LITHOGRAPHY [J].
KJELLBERG, T ;
SCHATZ, R .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 1992, 10 (09) :1256-1256
[10]   EFFICIENT SEMICONDUCTOR RING LASERS MADE BY A SIMPLE SELF-ALIGNED FABRICATION PROCESS [J].
KRAUSS, TF ;
DELARUE, RM ;
LAYBOURN, PJR ;
VOGELE, B ;
STANLEY, CR .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 1995, 1 (02) :757-761