HIGH-EFFICIENCY BINARY FAN-OUT GRATINGS BY MODULATION OF A HIGH-FREQUENCY CARRIER GRATING

被引：14

作者：

BLAIR, P ^{[1
]}

TAGHIZADEH, MR ^{[1
]}

PARKES, W ^{[1
]}

WILKINSON, CDW ^{[1
]}

机构：

[1] UNIV GLASGOW, DEPT ELECT ENGN, GLASGOW G12 8LT, LANARK, SCOTLAND

来源：

APPLIED OPTICS | 1995年 / 34卷 / 14期

关键词：

DIFFRACTIVE OPTICAL ELEMENTS; HIGH-FREQUENCY GRATINGS; SUBMICROMETER FABRICATION;

D O I：

10.1364/AO.34.002406

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A modulation scheme that uses pulse-position modulation of a high-frequency binary grating to increase the diffraction efficiency of the elements is presented. These elements are designed and fabricated with both one- and two-dimensional signals for operation in transmission or reflection modes in the visible and the infrared regions of the spectrum. A direct electron-beam lithography fabrication process capable of realizing features of similar to 280 nm with a resolution of 15 nm is described in detail. Experimental results show that diffraction efficiencies of >80% are attainable.

引用

页码：2406 / 2413

页数：8

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