Aerosol deposition method for fabrication of nano crystal ceramic layer - Novel ceramics coating with collision of fine powder at room temperature

被引：92

作者：

Akedo, J ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058564, Japan

来源：

DESIGNING, PROCESSING AND PROPERTIES OF ADVANCED ENGINEERING MATERIALS, PTS 1 AND 2 | 2004年 / 449-4卷

关键词：

aerosol; ceramic layer; fine particle; alpha-Al2O3; PZT; powder processing; MEMS;

D O I：

10.4028/www.scientific.net/MSF.449-452.43

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Aerosol deposition method (ADM) for shock-consolidation of fine ceramics powder to form dense and hard layers is reported. Submicron ceramic particles were accelerated by gas flow in the nozzle up to velocity of several hundred m/s. During interaction with substrate, these particles formed thick (10 similar to 100 mum), dense, uniform and hard ceramics layers. Depositions were fulfilled at room temperature. Every layer has polycrystalline structure with nano-meter order scale. The results of fabrications, microstructure, mechanical and electrical properties of oxides (alpha-Al2O3; Pb(Zr-0.52,Ti-0.48)O-3 etc.) and non-oxides materials are presented.

引用

页码：43 / 48

页数：6

共 21 条

[1] A PLANAR PROCESS FOR MICROFABRICATION OF A SCANNING TUNNELING MICROSCOPE [J].

AKAMINE, S ;

ALBRECHT, TR ;

ZDEBLICK, MJ ;

QUATE, CF .

SENSORS AND ACTUATORS A-PHYSICAL, 1990, 23 (1-3) :964-970

[2] Microstructure and electrical properties of lead zirconate titanate (Pb(Zr52/Ti48)O3) thick films deposited by aerosol deposition method [J].

Akedo, J ;

Lebedev, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (9B) :5397-5401

[3]

Akedo J, 2001, RRD MAT SCI, V2, P51

[4] Powder preparation in aerosol deposition method for lead zirconate titanate thick films [J].

Akedo, J ;

Lebedev, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2002, 41 (11B) :6980-6984

[5] Influence of carrier gas conditions on electrical and optical properties of Pb(Zr,Ti)O3 thin films prepared by aerosol deposition method [J].

Akedo, J ;

Lebedev, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2001, 40 (9B) :5528-5532

[6]

AKEDO J, IN PRESS P MRS

[7]

Akedo J., 2003, J SOC POWDER TECH JP, V40, P192

[8]

Asai N, 2003, PROC IEEE MICR ELECT, P247

[9] Cluster beam microfabrication of patterns of three-dimensional nanostructured objects [J].

Barborini, E ;

Piseri, P ;

Podesta', A ;

Milani, P .

APPLIED PHYSICS LETTERS, 2000, 77 (07) :1059-1061

[10]

BERGVELD P, 1994, P MICR TOT AN SYST W, P1

← 1 2 3 →