Powder preparation in aerosol deposition method for lead zirconate titanate thick films

被引：70

作者：

Akedo, J ^{[1
]}

Lebedev, M ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, AIST, Tsukuba, Ibaraki 3058564, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2002年 / 41卷 / 11B期

关键词：

aerosol deposition; shock compaction; PZT; actuator; micromachine; thick film; ultrafine particles;

D O I：

10.1143/JJAP.41.6980

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The influence of a pre-process for a starting powder in the deposition of ferroelectric thick films using the aerosol deposition method (ADM) was investigated. When a dry-milling procedure was introduced to the preparation of the ferroelectric powder, the deposition rate of ADM increased significantly up to 30-fold and reached 73 mum/min for a 5 mm(2) area. However, density and electrical properties of the thick film decreased. If heat treatment at 800degreesC for 4 h was additionally introduced to the pre-process of the starting powder, the deposition rate increased up to 7-10-fold as compared with that for a starting powder and the electrical properties were improved from P-r = 20 muC/cm(2) at E-c = 50 kV/cm to 32 muC/cm(2) at E-c = 45 kV/cm.

引用

页码：6980 / 6984

页数：5

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