Jet molding system for realization of three-dimensional micro-structures

We have developed a fabrication technology for realization of three-dimensional microstructures composed of different materials using excimer laser ablation and ultrafine particle (UFP) jet molding. We have named this technology the jet molding system (JMS). This method enables the production of three-dimentional microdevices composed of actuator, sensor materials (PZT), and electrodes (metal). Insert-molding and mask-deposition methods were applied to obtain these structures. SEM observation as well as density and electrical property measurements showed good pattern transfer fidelity with sufficient deposited layer quality (density of better than 85%, dielectric constant of deposited PZT layer of 760). The deposition rate of PZT was much faster than that obtained using any other deposition technique, and a PZT layer of 40 mu m of thick was formed with the desired metal electrode structure (C) 1998 Elsevier Science S.A. All rights reserved.