Structural modifications in titania-doped tantalum pentoxide crystals: a Raman scattering study

被引:24
作者
Dobal, PS
Katiyar, RS [1 ]
Jiang, Y
Guo, R
Bhalla, AS
机构
[1] Univ Puerto Rico, Dept Phys, Rio Piedras, PR 00931 USA
[2] Penn State Univ, Mat Res Lab, University Pk, PA 16802 USA
来源
INTERNATIONAL JOURNAL OF INORGANIC MATERIALS | 2001年 / 3卷 / 02期
基金
美国国家航空航天局;
关键词
oxides; crystal growth; Raman spectroscopy; phase transactions;
D O I
10.1016/S1466-6049(01)00003-4
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
Tantalum pentoxide (Ta2O5) is promising for coating and piezoelectric applications and has been considered as the dielectric gate material for the next generation of memory devices. In this work, TiO2-doped Ta2O5 crystals were prepared using the laser-heated pedestal growth technique, as grown specimens were found to crystallize in monoclinic phase at room temperature. The structural modifications in these crystals resulting from variation of TiO2 composition (0-11%) and temperature (-248-900 degreesC) were studied using Raman spectroscopy. The low frequency external modes (upsilon < 100 cm(-1)) that originate from the interaction between TaOn5-2 eta/Ta6O12+6 clusters/polyhedra exhibit a strong compositional and temperature dependence in terms of their intensity and frequency variations. The Raman spectral evolutions suggested a monoclinic to orthorhombic structural phase transition at about 327, 397, 487, and 577 degreesC For 0, 5, 8, and 11% TiO2-doped Ta2O5, respectively. (C) 2001 Elsevier Science Ltd. All lights reserved.
引用
收藏
页码:135 / 142
页数:8
相关论文
共 52 条
[11]   Room-temperature radio frequency sputtered Ta2O5:: A new etch mask for bulk silicon dissolved processes [J].
Chu, AK ;
Huang, YS ;
Tang, SH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (02) :455-459
[12]  
Class W, 1998, AIP CONF PROC, V449, P57
[13]   Monolayer-mediated deposition of tantalum(V) oxide thin film structures from solution precursors [J].
Clem, PG ;
Jeon, NL ;
Nuzzo, RG ;
Payne, DA .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1997, 80 (11) :2821-2827
[14]   DYNAMICAL, SCATTERING AND DIELECTRIC PROPERTIES OF FERROELECTRIC CRYSTALS [J].
COCHRAN, W .
ADVANCES IN PHYSICS, 1969, 18 (72) :157-&
[15]   CRYSTAL STABILITY AND THE THEORY OF FERROELECTRICITY .2. PIEZOELECTRIC CRYSTALS [J].
COCHRAN, W .
ADVANCES IN PHYSICS, 1961, 10 (40) :401-420
[16]   CRYSTAL STABILITY AND THE THEORY OF FERROELECTRICITY [J].
COCHRAN, W .
ADVANCES IN PHYSICS, 1960, 9 (36) :387-423
[17]   In situ infrared spectroscopic analysis of the adsorption of aromatic carboxylic acids to TiO2, ZrO2, Al2O3, and Ta2O5 from aqueous solutions [J].
Dobson, KD ;
McQuillan, AJ .
SPECTROCHIMICA ACTA PART A-MOLECULAR AND BIOMOLECULAR SPECTROSCOPY, 2000, 56 (03) :557-565
[18]  
ELISEEN AA, 1989, RUSS J INORG CHEM, V34, P1530
[19]   RAMAN-SPECTRUM AND PHASE-TRANSITION IN SYMTRIAZINE [J].
ELLIOTT, GR ;
IQBAL, Z .
JOURNAL OF CHEMICAL PHYSICS, 1975, 63 (05) :1914-1918
[20]   Effects of heating in air and chlorine atmosphere on the crystalline structure of pure Ta2O5 or mixed with carbon [J].
González, J ;
Ruiz, MD ;
Rivarola, JB ;
Pasquevich, D .
JOURNAL OF MATERIALS SCIENCE, 1998, 33 (16) :4173-4180