Atomic scale oxidation of a complex system:: O2/α-SiC(0001)-(3x3)

被引:71
作者
Amy, F
Enriquez, H
Soukiassian, P
Storino, PF
Chabal, YJ
Mayne, AJ
Dujardin, G
Hwu, YK
Brylinski, C
机构
[1] CEA Saclay, DSM, DRECAM, SPCSI,SIMA, F-91191 Gif Sur Yvette, France
[2] Univ Paris 11, Dept Phys, F-91405 Orsay, France
[3] Lucent Technol, Bell Labs, Murray Hill, NJ 07974 USA
[4] Univ Paris 11, Photophys Mol Lab, F-91405 Orsay, France
[5] Acad Sinica, Taipei 115, Taiwan
[6] Thomson CSF, Cent Rech Lab, THALES, F-91401 Orsay, France
关键词
D O I
10.1103/PhysRevLett.86.4342
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The atomic scale oxidation of the alpha -SiC(0001)-(3 x 3) surface is investigated by atom-resolved scanning tunneling microscopy, core level synchrotron radiation based photoemission spectroscopy, and infrared absorption spectroscopy. The results reveal that the initial oxidation takes place through the relaxation of lower layers, away from the surface dangling bond, in sharp contrast to silicon oxidation.
引用
收藏
页码:4342 / 4345
页数:4
相关论文
共 19 条
  • [1] SiO2/6H-SiC(0001)3x3 initial interface formation by Si overlayer oxidation
    Amy, F
    Soukiassian, P
    Hwu, YK
    Brylinski, C
    [J]. APPLIED PHYSICS LETTERS, 1999, 75 (21) : 3360 - 3362
  • [2] Identification of the 6H-SiC(0001) 3 x 3 surface reconstruction core-level shifted components
    Amy, F
    Soukiassian, P
    Hwu, YK
    Brylinski, C
    [J]. SURFACE SCIENCE, 2000, 464 (01) : L691 - L696
  • [3] [Anonymous], MODERN SEMICONDUCTOR
  • [4] ADSORPTION AND COADSORPTION OF BORON AND OXYGEN ON ORDERED ALPHA-SIC SURFACES
    BERMUDEZ, VM
    [J]. APPLIED SURFACE SCIENCE, 1995, 84 (01) : 45 - 63
  • [5] Choyke W, 1998, SILICON CARBIDE REV
  • [6] Choyke W, 1998, SILICON CARBIDE REV, V2
  • [7] New model of the initial stages of Si(111)-(7x7) oxidation
    Dujardin, G
    Mayne, A
    Comtet, G
    Hellner, L
    Jamet, M
    LeGoff, E
    Millet, P
    [J]. PHYSICAL REVIEW LETTERS, 1996, 76 (20) : 3782 - 3785
  • [8] GARFUNKEL E, 1998, NATO SCI SERIES, V3
  • [9] Site hopping of single chemisorbed oxygen molecules on Si(111)-(7x7) surfaces
    Hwang, IS
    Lo, RL
    Tsong, TT
    [J]. PHYSICAL REVIEW LETTERS, 1997, 78 (25) : 4797 - 4800
  • [10] SiC(0001)3x3-Si surface reconstruction - A new insight with a STM
    Kulakov, MA
    Henn, G
    Bullemer, B
    [J]. SURFACE SCIENCE, 1996, 346 (1-3) : 49 - 54