Structures of (C5H5N)(3)Al(N-3)(3), [Me(2)N(CH2)(3)]Al-2(N-3) and Me(2)(N-3)Al(H(2)NBu(t)). Low-temperature OMVPE of AlN in the absence of ammonia

被引：24

作者：

Fischer, RA

Miehr, A

Sussek, H

Pritzkow, H

Herdtweck, E

Muller, J

Ambacher, O

Metzger, T

机构：

[1] TECH UNIV MUNICH,INST ANORGAN CHEM,D-85747 GARCHING,GERMANY

[2] RHEIN WESTFAL TH AACHEN,INST ANORGAN CHEM,D-52056 AACHEN,GERMANY

[3] TECH UNIV MUNICH,WALTER SCHOTTKY INST,D-85748 GARCHING,GERMANY

[4] TECH UNIV MUNICH,LEHRSTUHL ANGEW MINERAL & GEOCHEM,D-85747 GARCHING,GERMANY

来源：

CHEMICAL COMMUNICATIONS | 1996年 / 23期

关键词：

D O I：

10.1039/cc9960002685

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

New Lewis-base stabilized monomeric azido alanes are synthesized by salt metathesis from the corresponding chloro alanes and an excess of sodium azide; thin films of crystalline AlN are grown by OMVPE at 400-850 degrees C in vacuo.

引用

页码：2685 / 2686

页数：2

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