Plasma-polymerized coatings for bio-MEMS applications

被引:30
作者
Bouaidat, S
Winther-Jensen, B
Christensen, SF
Jonsmann, J
机构
[1] Scandinavian Micro Biodevices AS, DK-3520 Farum, Denmark
[2] Tech Univ Denmark, Danish Polymer Ctr, DK-2800 Lyngby, Denmark
关键词
plasma-polymerized; micropatterning; lift-off; cell adhesive; cell non-adhesive; bioactive surfaces;
D O I
10.1016/j.sna.2003.10.032
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Coatings that provide either hydrophobic, hydrophilic, cell adhesive or cell non-adhesive functionalities have been deposited using three-phase low energy plasma-polymerization. The cell adhesive/non-adhesive coatings were tested using E. coli k-12. The four plasma-polymerized coatings are: para-xylene (PX), 1-vinyl-2-pyrrolidinone (VP), polyvinyldifluoride (PVDF) and phosphorous glass (SiPOC), respectively. In addition, micropatterning of PX and VP has been performed on the same silicon substrate. Feature sizes down to 2 mum and precise alignment were obtained using lift-off and cleanroom photolithography techniques. The patterning process used did not influence the wetability of the coatings. The simplicity of the lift-off technique and the sturdiness and versatility of the plasma-polymerized coatings, make this ideal for MEMS, bio-MEMS and microfluidic applications, where patterned surfaces with different functionalities are required on for instance the same microchip. (C) 2003 Published by Elsevier B.V.
引用
收藏
页码:390 / 394
页数:5
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