Improving the piezoelectric properties of thick-film PZT: the influence of paste composition, powder milling process and electrode material

被引：33

作者：

Torah, RN ^{[1
]}

Beeby, SP ^{[1
]}

White, NM ^{[1
]}

机构：

[1] Univ Southampton, Dept Elect & Comp Sci, Southampton SO17 1BJ, Hants, England

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2004年 / 110卷 / 1-3期

基金：

英国工程与自然科学研究理事会;

关键词：

piezoelectric; thick-film; d(33); milling;

D O I：

10.1016/j.sna.2003.09.027

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper details improvements of the d(33) coefficient for thick-film Lead-Zirconate-Titanate (PZT) layers. In particular, the effect that the powder milling process has on particle size, shape and distribution has been investigated. Ball milled, jet milled and attritor milled powders were obtained from Morgan Electro-Ceramics Ltd. These powders were mixed with various ratios of lead borosilicate glass in the range of 5-20% by weight and an appropriate quantity of Electro-Science Laboratories (ESL) 400 solvent to formulate a screen printable thixotropic paste. The use of a polymer top electrode to reduce the number of firing cycles the PZT layer is subjected to was also investigated. The results show that the highest values of d(33) were obtained from the ball milled powder with 10% glass content, but the most consistent results were obtained from the attritor milled samples. The samples printed with a polymer top electrode have shown an average increase of around 15% in the value of d(33.) (C) 2003 Published by Elsevier B.V.

引用

页码：378 / 384

页数：7

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