An investigation into the effect of modified firing profiles on the piezoelectric properties of thick-film PZT layers on silicon

被引:23
作者
Glynne-Jones, P [1 ]
Beeby, SP [1 ]
Dargie, P [1 ]
Papakostas, T [1 ]
White, NM [1 ]
机构
[1] Univ Southampton, Dept Elect & Comp Sci, Southampton SO17 1BJ, Hants, England
关键词
piezoelectric constants; static; hybrid microelectronics; thick-film sensors;
D O I
10.1088/0957-0233/11/5/312
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Screen-printed lead zirconate titanate (PZT) layers offer possibilities both for sensing and for actuation applications. The reaction between PZT and silicon during the high temperature sintering phase is a problem when combining PZT layers with silicon microelectromechanical systems. In this study we investigate a range of longer, lower temperature firing profiles for thick-film PZT, to reduce this reaction. Methods of measuring the d(33) piezoelectric coefficient of thick-film PZT layers are reviewed and the test rig used to compare samples is described. Temperatures below 800 degrees C are found to be insufficient to produce sintering. At other low temperatures, longer firing times are found to be necessary in order to produce consistent results. A temperature of 800 degrees C for 8 h was found to produce a reduction in the level of reaction, without a serious reduction of the piezoelectric activity.
引用
收藏
页码:526 / 531
页数:6
相关论文
共 16 条
  • [1] PREPARATION OF (100)-ORIENTED LEAD-ZIRCONATE-TITANATE FILMS BY SOL-GEL TECHNIQUE
    AOKI, K
    FUKUDA, Y
    NISHIMURA, A
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (9B): : 4147 - 4149
  • [2] Processing of PZT piezoelectric thick films on silicon for microelectromechancial systems
    Beeby, SP
    Blackburn, A
    White, NM
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1999, 9 (03) : 218 - 229
  • [3] Thick film PZT/micromachined silicon accelerometer
    Beeby, SP
    Ross, N
    White, NM
    [J]. ELECTRONICS LETTERS, 1999, 35 (23) : 2060 - 2062
  • [4] DOMAIN PROCESSES IN LEAD TITANATE ZIRCONATE AND BARIUM TITANATE CERAMICS
    BERLINCOURT, D
    KRUEGER, HHA
    [J]. JOURNAL OF APPLIED PHYSICS, 1959, 30 (11) : 1804 - 1810
  • [5] DARGIE PG, 1998, THESIS U SOUTHAMPTON
  • [6] CHARACTERIZATION OF PIEZOELECTRIC PROPERTIES OF ZINC-OXIDE THIN-FILMS DEPOSITED ON SILICON FOR SENSORS APPLICATIONS
    DESCHANVRES, JL
    REY, P
    DELABOUGLISE, G
    LABEAU, M
    JOUBERT, JC
    PEUZIN, JC
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 1992, 33 (1-2) : 43 - 45
  • [7] HARRIS N, 1998, P 9 MICR EUR WORKSH, P78
  • [8] HENDRICKS WC, 1993, MATER RES SOC S P, V310, P241
  • [9] *IEEE, 1987, 1761987 IEEE
  • [10] *IRE, 1961, STAND PIEZ CRYST MEA