Thick film PZT/micromachined silicon accelerometer

被引：25

作者：

Beeby, SP ^{[1
]}

Ross, N ^{[1
]}

White, NM ^{[1
]}

机构：

[1] Univ Southampton, Dept Elect & Comp Sci, Southampton SO17 1BJ, Hants, England

来源：

ELECTRONICS LETTERS | 1999年 / 35卷 / 23期

关键词：

D O I：

10.1049/el:19991398

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel accelerometer fabricated by a combination of screen-printing and silicon mircomachining is reported. This is the first device of its kind fabricated in this manner. Initial results indicate a sensitivity of 16pCg(-1) which compares very favourably with a sensitivity of 0.15pCg(-1) reported for thin-film devices.

引用

页码：2060 / 2062

页数：3

共 5 条

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[3]

HARRIS N, 1998, P 9 MICR EUR WORKSH, P78

[4] A novel micropump design with thick-film piezoelectric actuation [J].

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[5] Thick-film printing of PZT onto silicon [J].

Maas, R ;

Koch, M ;

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Evans, AGR .

MATERIALS LETTERS, 1997, 31 (1-2) :109-112

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