Fabrication and characterization of a piezoelectric accelerometer

被引：35

作者：

de Reus, R

Gullov, JO

Scheeper, PR

机构：

[1] Mikroelektr Centret, DK-2800 Lyngby, Denmark

[2] Bruel & Kjaer AS, DK-2850 Naerum, Denmark

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1999年 / 9卷 / 02期

关键词：

D O I：

10.1088/0960-1317/9/2/005

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Zinc oxide based piezoelectric accelerometers were fabricated by bulk micromachining. A high yield was obtained in a relatively simple process sequence. For two electrode configurations a direction selectivity better than 100 was obtained for acceleration in the vertical direction and a selectivity of 3 for acceleration in the horizontal direction, respectively. The charge sensitivity in the vertical direction is better than 0.1 pC g(-1) and a noise level of 1 x 10(-4) g Hz(-1/2) was estimated.

引用

页码：123 / 126

页数：4

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