Array of micromachined components fabricated using "micro-origami" method

被引：15

作者：

Vorob'ev, A ^{[1
]}

Vaccaro, P ^{[1
]}

Kubota, K ^{[1
]}

Saravanan, S ^{[1
]}

Aida, T ^{[1
]}

机构：

[1] ATR Adapt Commun Res Labs, Kyoto 6190288, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2003年 / 42卷 / 6B期

关键词：

MEMS; GaAs; free-standing micromachined structures; three-dimensional surface micromachining; strain-driven self-positioning;

D O I：

10.1143/JJAP.42.4024

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A two-dimensional array of self-positioning free-standing structures was fabricated using a new method of surface micromachining called "micro-origami". The array is fabricated by epitaxial growth of III-V multilayers on GaAs substrates followed by photolithography and wet etching. The structures move to their final position during the process. Future applications of micromachined structures obtained by this method are discussed.

引用

页码：4024 / 4026

页数：3

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