Developments in CVD-diamond synthesis during the past decade

被引:77
作者
Butler, JE [1 ]
Windischmann, H [1 ]
机构
[1] Univ Bristol, Bristol BS8 1TH, Avon, England
关键词
D O I
10.1557/S0883769400029316
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Understanding of the CVD-diamond deposition process has progressed to a level at which the technical challenges of producing diamond are no longer the main barrier to product introduction. Costs have decreased significantly to be competitive with existing products while offering superior performance. Some products such as tools have already penetrated the market, whereas others that represent a more difficult technical challenge - such as active devices - require much more development. Thermalmanagement products and radiation detectors remain more a challenge of cost rather than of technical performance.
引用
收藏
页码:22 / 27
页数:6
相关论文
共 44 条
[1]  
Angus J., 1994, SYNTHETIC DIAMOND EM, P21
[2]  
Angus J. C., 1989, P 1 INT S DIAM DIAM, V89, P1
[3]  
Bachmann P.K., 1998, HDB IND DIAMONDS DIA
[4]  
BADZIAN A, IN PRESS DIAMOND REL
[5]   CRYSTALLIZATION OF DIAMOND FROM THE GAS-PHASE .1. [J].
BADZIAN, AR ;
DEVRIES, RC .
MATERIALS RESEARCH BULLETIN, 1988, 23 (03) :385-400
[6]   THIN-FILM DIAMOND GROWTH MECHANISMS [J].
BUTLER, JE ;
WOODIN, RL .
PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 1993, 342 (1664) :209-224
[7]  
BUTLER JE, 1995, NATO ASI SER, V3, P105
[8]  
BUTLER JE, 1990, HIGH TEMP SCI, V27, P183
[9]   DETECTION OF GROUND-STATE ATOMIC-HYDROGEN IN A DC-PLASMA USING 3RD-HARMONIC GENERATION [J].
CELII, FG ;
THORSHEIM, HR ;
BUTLER, JE ;
PLANO, LS ;
PINNEO, JM .
JOURNAL OF APPLIED PHYSICS, 1990, 68 (08) :3814-3817
[10]   HYDROGEN-ATOM DETECTION IN THE FILAMENT-ASSISTED DIAMOND DEPOSITION ENVIRONMENT [J].
CELII, FG ;
BUTLER, JE .
APPLIED PHYSICS LETTERS, 1989, 54 (11) :1031-1033