Thin film gas chemical sensors based on resistive or optical detection

被引:4
作者
Jelinek, M [1 ]
Kocourek, T [1 ]
机构
[1] Acad Sci Czech Republic, Inst Phys, Prague 182221 8, Czech Republic
来源
13TH INTERNATIONAL SCHOOL ON QUANTUM ELECTRONICS: LASER PHYSICS AND APPLICATIONS | 2005年 / 5830卷
关键词
D O I
10.1117/12.617200
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Thin film gas sensors based on resistive or optical m- line detection are studied. The focus is on butane detection. Potentially suitable materials for detection are summarized and discussed. Experimental results reached with inorganic mid organic layers fabricated by pulsed laser deposition are presented.
引用
收藏
页码:40 / 49
页数:10
相关论文
共 40 条
[1]  
BROWN TC, 2004, OPTIC ENCY
[2]   Co3O4-based isobutane sensor operating at low temperatures [J].
Choi, SD ;
Min, BK .
SENSORS AND ACTUATORS B-CHEMICAL, 2001, 77 (1-2) :330-334
[3]  
Chrisey D. B., 1994, PULSED LASER DEPOSIT
[4]   Gas sensing properties of nano-ZnO prepared by arc plasma method [J].
Dong, LF ;
Cui, ZL ;
Zhang, ZK .
NANOSTRUCTURED MATERIALS, 1997, 8 (07) :815-823
[5]   partial derivativen/partial derivativeT measurements performed with guided waves and their application to the temperature sensitivity of wavelength-division multiplexing filters [J].
Drouard, E ;
Huguet-Chantôme, P ;
Escoubas, L ;
Flory, F .
APPLIED OPTICS, 2002, 41 (16) :3132-3136
[6]  
FLORY F, 1995, THIN FILMS OPTICLA S
[7]  
Frycek R, 2003, SOL ST PHEN, V90-91, P541
[8]  
GIULIO MD, 1996, J VAC SCI TECHNOL A, V14, P2215
[9]   Electrical and sensor properties of FeNbO4:: a new sensor material [J].
Gnanasekar, KI ;
Jayaraman, V ;
Prabhu, E ;
Gnanasekaran, T ;
Periaswami, G .
SENSORS AND ACTUATORS B-CHEMICAL, 1999, 55 (2-3) :170-174
[10]   SNO2 SENSORS - CURRENT STATUS AND FUTURE-PROSPECTS [J].
GOPEL, W ;
SCHIERBAUM, KD .
SENSORS AND ACTUATORS B-CHEMICAL, 1995, 26 (1-3) :1-12