Thickness effect on shape memory behavior of Ti-50.0at.%Ni thin film

被引：67

作者：

Ishida, A ^{[1
]}

Sato, M ^{[1
]}

机构：

[1] Natl Inst Mat Sci, Tsukuba, Ibaraki 3050047, Japan

来源：

ACTA MATERIALIA | 2003年 / 51卷 / 18期

关键词：

sputtering; shape memory alloys (SMA); thin films; martensitic phase transformation; thickness effect;

D O I：

10.1016/S1359-6454(03)00420-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The thickness effect on the shape memory behavior of Ti-50.0at.%Ni thin films was investigated. It was found that the transformation strain and residual strain under a constant stress are very sensitive to the film thickness when the thickness is less than the average grain size, 5 mum. Cross-sectional observation showed that these strains are affected by two kinds of constraints from surrounding grains and surface oxide layers. With decreasing thickness, the former effect becomes weak, but the latter effect becomes strong. As a result, the transformation strain and residual strain show a maximum around a thickness of 1-2 mum. In addition, the transformation temperatures were also found to be affected by surface oxidation if the thickness is less than 1 mum. (C) 2003 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

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页码：5571 / 5578

页数：8

相关论文

共 15 条

[1] Thin-film shape-memory alloy actuated micropumps [J].

Benard, WL ;

Kahn, H ;

Heuer, AH ;

Huff, MA .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1998, 7 (02) :245-251

[2] Oxidation behavior of equiatomic TiNi alloy in high temperature air environment [J].

Chu, CL ;

Wu, SK ;

Yen, YC .

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1996, 216 (1-2) :193-200

[3] The role of intergranular constraint on the stress-induced martensitic transformation in textured polycrystalline NiTi [J].

Gall, K ;

Lim, TJ ;

McDowell, DL ;

Sehitoglu, H ;

Chumlyakov, YI .

INTERNATIONAL JOURNAL OF PLASTICITY, 2000, 16 (10-11) :1189-1214

[4] Stress-strain curves of sputter-deposited Ti-Ni thin films [J].

Ishida, A ;

Sato, M ;

Kimura, T ;

Miyazaki, S .

PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 2000, 80 (04) :967-980

[5] Effects of composition and annealing on shape memory behavior of Ti-rich Ti-Ni thin films formed by sputtering [J].

Ishida, A ;

Sato, M ;

Kimura, T ;

Sawaguchi, T .

MATERIALS TRANSACTIONS, 2001, 42 (06) :1060-1067

[6]

ISHIDA A, 1995, MATER RES SOC SYMP P, V360, P381, DOI 10.1557/PROC-360-381

[7] SHAPE-MEMORY THIN-FILM OF TI-NI FORMED BY SPUTTERING [J].

ISHIDA, A ;

TAKEI, A ;

MIYAZAKI, S .

THIN SOLID FILMS, 1993, 228 (1-2) :210-214

[8] Effect of aging on shape memory behavior of Ti-51.3 at pct Ni thin films [J].

Ishida, A ;

Sato, M ;

Takei, A ;

Nomura, K ;

Miyazaki, S .

METALLURGICAL AND MATERIALS TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1996, 27 (12) :3753-3759

[9] Vacuum-deposited TiNi shape memory film. Characterization and applications in microdevices [J].

Johnson, A.David .

Journal of Micromechanics and Microengineering, 1991, 1 (01) :34-41

[10] Shape memory microvalves based on thin films or rolled sheets [J].

Kohl, M ;

Dittmann, D ;

Quandt, E ;

Winzek, B ;

Miyazaki, S ;

Allen, DM .

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1999, 273 :784-788