Thin-film shape-memory alloy actuated micropumps

被引:297
作者
Benard, WL [1 ]
Kahn, H
Heuer, AH
Huff, MA
机构
[1] Case Western Reserve Univ, Dept Elect Engn & Appl Phys, Cleveland, OH 44106 USA
[2] Case Western Reserve Univ, Dept Mat Sci & Engn, Cleveland, OH 44106 USA
关键词
microactuator; micropump; shape-memory alloy; TiNi;
D O I
10.1109/84.679390
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Micropumps capable of precise handling of low-fluid volumes have the potential to revolutionize applications in fields such as drug delivery, fuel injection, and micrototal chemical analysis systems (mu TAS). Traditional microactuators used in micropumps suffer from low strokes and, as a result, are unsuitable for achieving large fluid displacement. They also suffer low-actuation work densities, which translate to low forces. We investigate the use of the shape-memory effect (SME) in sputter-deposited thin-film shape-memory alloy (SMA) titanium nickel (TiNi) as an actuator for microelectromechanical systems (MEMS)-based microfluidic devices, as it is capable of both high force and high strains. The resistivity of the SMA thin film is suitable for Joule heating, which allows direct electrical control of the actuator. Two micropump designs were fabricated-one with a novel complementary actuator and the other with a polyimide-biased actuator-which provided thermal isolation between the heated microactuator and the fluid being pumped. A maximum water how rate of 50 mu l/min was achieved.
引用
收藏
页码:245 / 251
页数:7
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