Correlation of nanomechanical and nanotribological behavior of thin DLC coatings on different substrates

被引：32

作者：

Staedler, T ^{[1
]}

Schiffmann, K ^{[1
]}

机构：

[1] Fraunhofer Inst Surface Engn & Thin Films, D-38108 Braunschweig, Germany

来源：

SURFACE SCIENCE | 2001年 / 482卷

关键词：

coatings; friction; carbon; diamond; tribology;

D O I：

10.1016/S0039-6028(01)00726-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The use of tribological coatings with film thicknesses in the submicrometer regime is an increasing field of applications. In this work diamond-like carbon films with a thickness of 250 nm deposited via plasma enhanced chemical vapor deposition on different substrates are characterized by nanoindentation and microscratching in combination with scanning probe microscopy. This configuration allows the testing of samples with loads between 1 muN and 10 mN and a high local resolution. First the influence of the substrate is analyzed with respect to the mechanical properties of the film/substrate system. Furthermore effects of different substrates with respect to the friction and wear behavior for scratch as well as oscillating tests are observed. These results are correlated to the results of nanoindentation. The substrates cover the range of very soft (SU8 photoresist) up to very hard (AlTiC ceramic) materials showing a clear influence on the tribological response of the systems even in case of indenter displacements being small compared to film thickness (e.g. in the low-load regime). (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：1125 / 1129

页数：5

共 20 条

[1] Chemical, mechanical and tribological characterization of ultra-thin and hard amorphous carbon coatings as thin as 3.5 nm: recent developments [J].

Bhushan, B .

[2]

Bowden F. P., 1954, FRICTION LUBRICATION

[3] HARDNESS MEASUREMENTS OF THIN FILMS-DETERMINING THE CRITICAL RATIO OF DEPTH TO THICKNESS USING FEM [J].

CAI, X ;

BANGERT, H .

THIN SOLID FILMS, 1995, 264 (01) :59-71

[4]

EHRFELD W, 2000, P MICROTCC, V1, P9

[5] THE DETERMINATION OF FILM HARDNESS FROM THE COMPOSITE RESPONSE OF FILM AND SUBSTRATE TO NANOMETER SCALE INDENTATIONS [J].

FABES, BD ;

OLIVER, WC ;

MCKEE, RA ;

WALKER, FJ .

JOURNAL OF MATERIALS RESEARCH, 1992, 7 (11) :3056-3064

[6] Mechanical and tribological properties of hard carbon coatings for magnetic recording heads [J].

Gupta, BK ;

Bhushan, B .

WEAR, 1995, 190 (01) :110-122

[7] Analysis of nanoindentation load-displacement loading curves [J].

Hainsworth, SV ;

Chandler, HW ;

Page, TF .

JOURNAL OF MATERIALS RESEARCH, 1996, 11 (08) :1987-1995

[8]

KORUNSKY AM, 1998, SURF COAT TECH, V99, P171

[9] Diamond-like carbon - present status [J].

Lifshitz, Y .

[10] Exploration of the plate bending model for predicting the hardness response of coated systems [J].

McGurk, MR ;

Page, TF .

SURFACE & COATINGS TECHNOLOGY, 1997, 92 (1-2) :87-95

← 1 2 →