Diamond-like carbon - present status

被引:484
作者
Lifshitz, Y [1 ]
机构
[1] Soreq NRC, IL-81800 Yavne, Israel
关键词
characterization; DLC; growth mechanisms; properties;
D O I
10.1016/S0925-9635(99)00087-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Hydrogen free diamond-like carbon (DLC) films have been the subject of investigation all over the world during the past 25 years due to the unique combination of their properties that can be found between those of diamond and those of graphite. Intensive work throughout the world in the past 10 years has led to a much better understanding of the complicated mechanisms involved in the deposition of these films. This led to a significant improvement in the deposition processes in the variety of systems employed, enabling fabrication of films with better properties. The present work gives the author's assessment of the current status of DLC film deposition. Topics addressed include: deposition systems; characterization methods; film properties; and possible applications. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:1659 / 1676
页数:18
相关论文
共 99 条
[1]   ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J].
AISENBERG, S ;
CHABOT, R .
JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) :2953-+
[2]  
AISENBERG S, 1990, MATER SCI FORUM, V52, P1
[3]   PERFORMANCE OF MASS-ANALYZED, LOW-ENERGY, DUAL-ION BEAM SYSTEM FOR MATERIALS RESEARCH [J].
ALBAYATI, AH ;
MARTON, D ;
TODOROV, SS ;
BOYD, KJ ;
RABALAIS, JW ;
ARMOUR, DG ;
GORDON, JS ;
DULLER, G .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (08) :2680-2692
[4]  
ALEXANDROU I, 1997, I PHYS C SER, V153, P581
[5]   AMORPHOUS DIAMOND-SI SEMICONDUCTOR HETEROJUNCTIONS [J].
AMARATUNGA, GAJ ;
SEGAL, DE ;
MCKENZIE, DR .
APPLIED PHYSICS LETTERS, 1991, 59 (01) :69-71
[6]   Hard elastic carbon thin films from linking of carbon nanoparticles [J].
Amaratunga, GAJ ;
Chhowalla, M ;
Kiely, CJ ;
Alexandrou, I ;
Aharonov, R ;
Devenish, RM .
NATURE, 1996, 383 (6598) :321-323
[7]  
AMARATUNGA GAJ, 1993, J NONCRYSTALLINE SOL, V164, P119
[8]   WEAR TESTING OF CVD DIAMOND FILMS [J].
BACHMANN, PK ;
LADE, H ;
LEERS, D ;
WIECHERT, DU ;
THEUNISSEN, GSAM .
DIAMOND AND RELATED MATERIALS, 1994, 3 (4-6) :799-804
[9]   EELS ANALYSIS OF VACUUM ARC-DEPOSITED DIAMOND-LIKE FILMS [J].
BERGER, SD ;
MCKENZIE, DR ;
MARTIN, PJ .
PHILOSOPHICAL MAGAZINE LETTERS, 1988, 57 (06) :285-290
[10]  
CHOOWALLA M, 1997, J APPL PHYS, V81, P139