Diamond-like carbon - present status

Hydrogen free diamond-like carbon (DLC) films have been the subject of investigation all over the world during the past 25 years due to the unique combination of their properties that can be found between those of diamond and those of graphite. Intensive work throughout the world in the past 10 years has led to a much better understanding of the complicated mechanisms involved in the deposition of these films. This led to a significant improvement in the deposition processes in the variety of systems employed, enabling fabrication of films with better properties. The present work gives the author's assessment of the current status of DLC film deposition. Topics addressed include: deposition systems; characterization methods; film properties; and possible applications. (C) 1999 Elsevier Science S.A. All rights reserved.