Enhanced functionality of cantilever based mass sensors using higher modes

被引：226

作者：

Dohn, S ^{[1
]}

Sandberg, R ^{[1
]}

Svendsen, W ^{[1
]}

Boisen, A ^{[1
]}

机构：

[1] Tech Univ Denmark, Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark

来源：

APPLIED PHYSICS LETTERS | 2005年 / 86卷 / 23期

关键词：

D O I：

10.1063/1.1948521

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

By positioning a single gold particle at different locations along the length axis on a cantilever based mass sensor, we have investigated the effect of mass position on the mass responsivity and compared the results to simulations. A significant improvement in quality factor and responsivity was achieved by operating the cantilever in the fourth bending mode thereby increasing the intrinsic sensitivity. It is shown that the use of higher bending modes grants a spatial resolution and thereby enhances the functionality of the cantilever based mass sensor. (c) 2005 American Institute of Physics.

引用

页码：1 / 3

页数：3

共 15 条

[1] Nanostructured silicon for studying fundamental aspects of nanomechanics [J].

Blick, RH ;

Erbe, A ;

Pescini, L ;

Kraus, A ;

Scheible, DV ;

Beil, FW ;

Hoehberger, E ;

Hoerner, A ;

Kirschbaum, J ;

Lorenz, H .

JOURNAL OF PHYSICS-CONDENSED MATTER, 2002, 14 (34) :R905-R945

[2] ADSORPTION-INDUCED SURFACE STRESS AND ITS EFFECTS ON RESONANCE FREQUENCY OF MICROCANTILEVERS [J].

CHEN, GY ;

THUNDAT, T ;

WACHTER, EA ;

WARMACK, RJ .

JOURNAL OF APPLIED PHYSICS, 1995, 77 (08) :3618-3622

[3] Vibration characteristics of a cantilever plate with attached spring-mass system [J].

Chiba, M ;

Sugimoto, T .

JOURNAL OF SOUND AND VIBRATION, 2003, 260 (02) :237-263

[4] Ultrasensitive nanoelectromechanical mass detection [J].

Ekinci, KL ;

Huang, XMH ;

Roukes, ML .

APPLIED PHYSICS LETTERS, 2004, 84 (22) :4469-4471

[5] Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems [J].

Ekinci, KL ;

Yang, YT ;

Roukes, ML .

JOURNAL OF APPLIED PHYSICS, 2004, 95 (05) :2682-2689

[6] Translating biomolecular recognition into nanomechanics [J].

Fritz, J ;

Baller, MK ;

Lang, HP ;

Rothuizen, H ;

Vettiger, P ;

Meyer, E ;

Güntherodt, HJ ;

Gerber, C ;

Gimzewski, JK .

SCIENCE, 2000, 288 (5464) :316-318

[7] On the eigenfrequencies for mass loaded beams under classical boundary conditions [J].

Low, KH .

JOURNAL OF SOUND AND VIBRATION, 1998, 215 (02) :381-389

[8] Gravimetric sensing of metallic deposits using an end-loaded microfabricated beam structure [J].

Oden, PI .

SENSORS AND ACTUATORS B-CHEMICAL, 1998, 53 (03) :191-196

[9] Mass sensing of adsorbed molecules in sub-picogram sample with ultrathin silicon resonator [J].

Ono, T ;

Li, XX ;

Miyashita, H ;

Esashi, M .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2003, 74 (03) :1240-1243

[10] Natural frequencies and open-loop responses of an elastic beam fixed on a moving cart and carrying an intermediate lumped mass [J].

Park, S ;

Chung, WK ;

Youm, Y ;

Lee, JW .

JOURNAL OF SOUND AND VIBRATION, 2000, 230 (03) :591-615

← 1 2 →