Ultrasensitive nanoelectromechanical mass detection

被引:518
作者
Ekinci, KL [1 ]
Huang, XMH [1 ]
Roukes, ML [1 ]
机构
[1] CALTECH, Pasadena, CA 91125 USA
关键词
D O I
10.1063/1.1755417
中图分类号
O59 [应用物理学];
学科分类号
摘要
We describe the application of nanoelectromechanical systems (NEMS) to ultrasensitive mass detection. In these experiments, a modulated flux of atoms was adsorbed upon the surface of a 32.8 MHz NEMS resonator within an ultrahigh-vacuum environment. The mass-induced resonance frequency shifts by these adsorbates were then measured to ascertain a mass sensitivity of 2.53x10(-18) g. In these initial measurements, this sensitivity is limited by the noise in the NEMS displacement transducer; the ultimate limits of the technique are set by fundamental phase noise processes. Our results and analysis indicate that mass sensing of individual molecules will be realizable with optimized NEMS devices. (C) 2004 American Institute of Physics.
引用
收藏
页码:4469 / 4471
页数:3
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