Reinforcement of PDMS masters using SU-8 truss structures

被引：30

作者：

Govindaraju, A

Chakraborty, A

Luo, C

机构：

[1] Louisiana Tech Univ, Elect Engn Program, Ruston, LA 71272 USA

[2] Louisiana Tech Univ, Inst Micromfg, Ruston, LA 71272 USA

[3] Louisiana Tech Univ, Biomed Engn Program, Ruston, LA 71272 USA

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2005年 / 15卷 / 06期

关键词：

D O I：

10.1088/0960-1317/15/6/023

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work, a new method was developed to increase the stiffness of polydimethylsiloxane (PDMS) masters using SU-8 truss structures, aimed at reducing residual deformations of the PDMS masters induced in the molding process. Using this method, both global and local residual deformations in the released PDMS master have been reduced.

引用

页码：1303 / 1309

页数：7

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