MoRu-Be multilayer-coated grating with 10.4% normal-incidence efficiency near the 11.4-nm wavelength

被引：15

作者：

Montcalm, C

Bajt, S

Seely, JF

机构：

[1] Univ Calif Lawrence Livermore Natl Lab, Livermore, CA 94551 USA

[2] USN, Div Space Sci, Res Lab, Washington, DC 20375 USA

来源：

OPTICS LETTERS | 2001年 / 26卷 / 03期

关键词：

D O I：

10.1364/OL.26.000125

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A MoRu-Be multilayer coating was applied to a diffraction grating to enhance the grating's normal-incidence efficiency near 11.4 nm wavelength. The holographic grating substrate had a blazed groove profile with 2400 grooves/mm and a microroughness of 0.8 nm. The efficiency in the second diffraction order, measured with synchrotron radiation, was 10.4% at a wavelength of 11.37 nm. (C) 2001 Optical Society of America.

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页码：125 / 127

页数：3

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