Deposition and electrical properties of N-In codoped p-type ZnO films by ultrasonic spray pyrolysis

被引:322
作者
Bian, JM [1 ]
Li, XM [1 ]
Gao, XD [1 ]
Yu, WD [1 ]
Chen, LD [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China
关键词
D O I
10.1063/1.1644331
中图分类号
O59 [应用物理学];
学科分类号
摘要
The N-In codoped p-type ZnO films have been prepared by ultrasonic spray pyrolysis. X-ray photoelectron spectroscopy analysis confirmed the presence of nitrogen and indium in the codoped films, and the incorporation of indium causes the change in the chemical state of nitrogen, which promotes the formation of p-type conduction. Low resistivity of 1.7x10(-2) Omega cm, high carrier concentration of 2.44x10(18) cm(-3) and Hall mobility of 155 cm(2) V-1 s(-1) at room temperature for the codoped films were obtained. A conversion from p-type conduction to n type in a range of temperature has been identified by the measurement of Seebeck and Hall effect. (C) 2004 American Institute of Physics.
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页码:541 / 543
页数:3
相关论文
共 8 条
[1]   Anomalous barium filling fraction and n-type thermoelectric performance of BayCo4Sb12 [J].
Chen, LD ;
Kawahara, T ;
Tang, XF ;
Goto, T ;
Hirai, T ;
Dyck, JS ;
Chen, W ;
Uher, C .
JOURNAL OF APPLIED PHYSICS, 2001, 90 (04) :1864-1868
[2]   Fabrication of the low-resistive p-type ZnO by codoping method [J].
Joseph, M ;
Tabata, H ;
Saeki, H ;
Ueda, K ;
Kawai, T .
PHYSICA B-CONDENSED MATTER, 2001, 302 :140-148
[3]   p-type electrical conduction in ZnO thin films by Ga and N codoping [J].
Joseph, M ;
Tabata, H ;
Kawai, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1999, 38 (11A) :L1205-L1207
[4]   Radiative and nonradiative recombination processes in lattice-matched (Cd,Zn)O/(Mg,Zn)O multiquantum wells [J].
Makino, T ;
Chia, CH ;
Tuan, NT ;
Segawa, Y ;
Kawasaki, M ;
Ohtomo, A ;
Tamura, K ;
Koinuma, H .
APPLIED PHYSICS LETTERS, 2000, 77 (11) :1632-1634
[5]  
ROWE DM, 1995, HDB THERMOELECTRIC A
[6]   Preparation of p-type ZnO films by doping of Be-N bonds [J].
Sanmyo, M ;
Tomita, Y ;
Kobayashi, K .
CHEMISTRY OF MATERIALS, 2003, 15 (04) :819-821
[7]   Materials science - Will UV lasers beat the blues? [J].
Service, RE .
SCIENCE, 1997, 276 (5314) :895-895
[8]   Physics and control of valence states in ZnO by codoping method [J].
Yamamoto, T ;
Katayama-Yoshida, H .
PHYSICA B-CONDENSED MATTER, 2001, 302 :155-162