The application of focused ion beam technology to the characterization of coatings

被引：46

作者：

Cairney, JM ^{[1
]}

Munroe, PR ^{[1
]}

Hoffman, M ^{[1
]}

机构：

[1] Univ New S Wales, Sydney, NSW 2052, Australia

来源：

SURFACE & COATINGS TECHNOLOGY | 2005年 / 198卷 / 1-3期

关键词：

focused ion beam; coatings; electron microscopy;

D O I：

10.1016/j.surfcoat.2004.10.042

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

An outline of the application of the focused ion beam (FIB) workstation to the characterization of wear-resistant coatings is provided. Specimen preparation difficulties sometimes limit the usefulness of electron microscopy for microstructural characterization of coatings. However, FIB technology overcomes many of these difficulties allowing microstructural characterization to be performed both by cross-sectioning and imaging coatings and by specimen preparation of electron transparent cross-sections for subsequent examination by electron microscopy. In addition, the FIB may be combined with other techniques, such as nanoindentation or wear testing, to obtain further information about the mechanisms governing the performance of the coatings in service. (c) 2004 Elsevier B.V. All rights reserved.

引用

页码：165 / 168

页数：4

共 16 条

[1] Nature of contact deformation of TiN films on steel [J].