Characterization of a WO3 thin film chlorine sensor

被引：51

作者：

Bender, F ^{[1
]}

Kim, C

Mlsna, T

Vetelino, JF

机构：

[1] Univ Maine, Surface Sci & Technol Lab, Orono, ME 04469 USA

[2] Sensor Res & Dev Corp, Orono, ME 04473 USA

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2001年 / 77卷 / 1-2期

关键词：

chemiresistive sensor; WO3; chlorine; gas sensors;

D O I：

10.1016/S0925-4005(01)00711-0

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A semiconducting metal oxide (SMO) gas sensor for the detection of chlorine has been developed and characterized. A WO3 thin film has been used as the sensing element. The sensors were found to respond to sub-ppm chlorine concentrations by a reversible decrease in conductivity up to three orders of magnitude, depending on operating temperature and sensor design parameters such as electrode material. The influence of annealing on sensor performance is discussed. Several observations in the gas sensing experiments as well as preliminary X-ray photoelectron spectroscopy (XPS) results give some insight into the chemical and physical processes underlying the sensor response. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：281 / 286

页数：6

共 34 条

[1] Influence of chlorine on planar optical guide cladded with RbCl and AgCl [J].

Ansari, ZA ;

Karekar, RN ;

Aiyer, RC .

APPLIED SURFACE SCIENCE, 1998, 125 (02) :149-156

[2] Potentiometric chlorine gas sensor using BaCl2-KCl solid electrolyte: The influences of barium oxide contamination [J].

Aono, H ;

Yamabayashi, A ;

Sugimoto, E ;

Mori, Y ;

Sadaoka, Y .

SENSORS AND ACTUATORS B-CHEMICAL, 1997, 40 (01) :7-13

[3] The influence of ammonia, chlorine and nitrogen dioxide on chloro-aluminium phthalocyanine thin films [J].

AzimAraghi, ME ;

Krier, A .

APPLIED SURFACE SCIENCE, 1997, 119 (3-4) :260-266

[4] A KINETO-OPTICAL METHOD FOR THE DETERMINATION OF CHLORINE GAS [J].

BARON, MG ;

NARAYANASWAMY, R ;

THORPE, SC .

SENSORS AND ACTUATORS B-CHEMICAL, 1995, 29 (1-3) :358-362

[5] Immobilization of ruthenium tris-bipyridyl complex for chlorine gas detection [J].

Brook, TE ;

Narayanaswamy, R .

SENSORS AND ACTUATORS B-CHEMICAL, 1997, 39 (1-3) :195-201

[6] ELLIPSOMETRIC SENSOR FOR H2S, SO2, CL2 DETERMINATION IN AIR [J].

BRUDZEWSKI, K .

SENSORS AND ACTUATORS B-CHEMICAL, 1992, 9 (01) :59-62

[7]

CALBRESE EJ, 1991, AIR TOXICS RISK ASSE

[8] Cross sensitivity and stability of NO2 sensors from WO3 thin film [J].

Cantalini, C ;

Pelino, M ;

Sun, HT ;

Faccio, M ;

Santucci, S ;

Lozzi, L ;

Passacantando, M .

SENSORS AND ACTUATORS B-CHEMICAL, 1996, 35 (1-3) :112-118

[9]

CARON JJ, 1997, IEEE INT FREQ CONTR, P156

[10] POTENTIOMETRIC GAS SENSOR FOR THE DETERMINATION OF FREE CHLORINE IN STATIC OR FLOW-INJECTION ANALYSIS SYSTEMS [J].

COETZEE, JF ;

GUNARATNA, C .

ANALYTICAL CHEMISTRY, 1986, 58 (03) :650-653

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