Ionised cluster beams as a hardness measurement tool

Large cluster ion bombardment has been shown to be a unique tool for generating a variety of bombarding effects over a broad range of acceleration energies. We propose to use the effects of the impact of Large gas cluster beams on the surface for a new hardness measurement technique. The cluster impact leaves a crater on the surface, the size of which varies according to the surface hardness and the cluster parameters (which can be pre-determined). With proper calibration, this effect can be used for determination of hardness. Alternatively, the sputtering yield can be used for the same purpose. These are entirely surface effects and depend on the surface material and not on the substrate. This measurement method also eliminates the need for indenters that are harder than the material measured. The technique is particularly useful for measuring hardness of thin film coatings deposited on softer substrates (for which no other technique is available). (C) 1999 Elsevier Science B.V. All rights reserved.