Ionised cluster beams as a hardness measurement tool

被引：6

作者：

Insepov, Z ^{[1
]}

Manory, R

Matsuo, J

Yamada, I

机构：

[1] Kyoto Univ, Ion Beam Engn Expt Lab, Sakyo Ku, Kyoto 6068501, Japan

[2] Royal Melbourne Inst Technol, Dept Chem & Met Engn, Melbourne, Vic 3001, Australia

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1999年 / 148卷 / 1-4期

关键词：

cluster; crater; sputtering; Brinell hardness number;

D O I：

10.1016/S0168-583X(98)00760-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Large cluster ion bombardment has been shown to be a unique tool for generating a variety of bombarding effects over a broad range of acceleration energies. We propose to use the effects of the impact of Large gas cluster beams on the surface for a new hardness measurement technique. The cluster impact leaves a crater on the surface, the size of which varies according to the surface hardness and the cluster parameters (which can be pre-determined). With proper calibration, this effect can be used for determination of hardness. Alternatively, the sputtering yield can be used for the same purpose. These are entirely surface effects and depend on the surface material and not on the substrate. This measurement method also eliminates the need for indenters that are harder than the material measured. The technique is particularly useful for measuring hardness of thin film coatings deposited on softer substrates (for which no other technique is available). (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：47 / 52

页数：6

共 18 条

[11] THERMODYNAMICAL AND STRUCTURAL-PROPERTIES OF FCC TRANSITION-METALS USING A SIMPLE TIGHT-BINDING MODEL [J].

ROSATO, V ;

GUILLOPE, M ;

LEGRAND, B .

PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1989, 59 (02) :321-336

[12] STM observation of HOPG surfaces irradiated with Ar cluster ions [J].

Seki, T ;

Kaneko, T ;

Takeuchi, D ;

Aoki, T ;

Matsuo, J ;

Insepov, Z ;

Yamada, I .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 121 (1-4) :498-502

[13] Study of Ar cluster ion bombardment of a sapphire surface [J].

Takeuchi, D ;

Fukushima, K ;

Matsuo, J ;

Yamada, I .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 121 (1-4) :493-497

[14] Computational alchemy: The search for new superhard materials [J].

Teter, DM .

MRS BULLETIN, 1998, 23 (01) :22-27

[15] Surface modifications by gas cluster ion beams [J].

Yamada, I ;

Matsuo, J ;

Insepov, Z ;

Akizuki, M .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 106 (1-4) :165-169

[16]

Yamada I, 1996, MATER RES SOC SYMP P, V396, P149

[17] SURFACE MODIFICATION WITH GAS CLUSTER ION-BEAMS [J].

YAMADA, I ;

BROWN, WL ;

NORHBY, JA ;

SOSNOWSKI, M .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 79 (1-4) :223-226

[18]

YAMADA I, 1996, ADV METALLIZATION FU, V427, P263

← 1 2 →