Fabrication of diamond microstructures for microelectromechanical systems (MEMS) by a surface micromachining process

被引：39

作者：

Ramesham, R ^{[1
]}

机构：

[1] CALTECH, Jet Prop Lab, Pasadena, CA 91109 USA

来源：

THIN SOLID FILMS | 1999年 / 340卷 / 1-2期

基金：

美国国家航空航天局;

关键词：

diamond; microstructures; beams; bridges; cantilever beams; selective deposition;

D O I：

10.1016/S0040-6090(98)01370-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Selective polycrystalline diamond thin film has been grown on a silicon dioxide/silicon substrate using high pressure microwave plasma-assisted chemical vapor deposition from a gas mixture of methane and hydrogen at a substrate temperature of 950 degrees C. A simple process flow has been developed to fabricate diamond microstructures such as diamond beams and cantilever beams using surface micromachining and photolithography for the first time. Scanning electron and optical microscopy has been used to characterize the surface micromachined diamond microstructures. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：1 / 6

页数：6

共 18 条

[1]

ASLAM M, 1995, DIGEST TECHNICAL PAP, V2, P3

[2] SYNTHETIC DIAMOND MICROMECHANICAL MEMBRANES, CANTILEVER BEAMS, AND BRIDGES [J].