Growth kinetics and thermodynamic stability of octadecyltrichlorosilane self-assembled monolayer on Si (100) substrate

被引:41
作者
Kulkarni, SA
Mirji, SA
Mandale, AB
Gupta, RP
Vijayamohanan, KP [1 ]
机构
[1] Natl Chem Lab, Div Phys Chem, Pune 411008, Maharashtra, India
[2] Natl Chem Lab, Ctr Mat Characterizat, Pune 411008, Maharashtra, India
[3] Cent Elect Engn Res Inst, Pilani 333031, Rajasthan, India
关键词
self-assembled monolayers (SAMs); Gibbs's free energy (AG); growth kinetics; Zisman plot; octadecyltrichlorosilane (OTS);
D O I
10.1016/j.matlet.2005.07.026
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have studied the growth kinetics and thermodynamic stability of octadecyltrichlorosilane (OTS) self-assembled monolayers on Si (100) substrate in order to understand its role in controlling the adhesion and surface hydrophobicity. Time-dependent contact angle measurements, using water as a function of OTS concentration, show rapid monolayer formation in the initial stage followed by a slow attainment of full coverage and the overall kinetics approximately follows the Langmuir adsorption isotherm. The adsorption rate constant (k(a) = 150 M-1 s(-1)) is found to be significantly greater than the desorption rate constant (k(d) = 0.156 s(-1)) while the Gibbs free energy (Delta G(ads)) change amounts to -4.2 kcal/mol suggesting thermodynamic stability of OTS monolayer on a silicon surface. Partial monolayer formation by a 'uniform' growth mechanism, even at low coverage, is revealed by atomic force microscopy (AFM) in conjunction with grazing angle FTIR spectroscopy. Analysis of the interfacial adhesion properties using Zisman plot suggests a critical surface tension (gamma(c)) of 20.7 dyn/cm for OTS monolayer on Si (100) surface. (C) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:3890 / 3895
页数:6
相关论文
共 36 条
[22]   Quantitating the balance between enthalpic and entropic forces in alkanethiol/gold monolayer self assembly [J].
Schessler, HM ;
Karpovich, DS ;
Blanchard, GJ .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1996, 118 (40) :9645-9651
[23]   GROWTH OF A SELF-ASSEMBLED MONOLAYER BY FRACTAL AGGREGATION [J].
SCHWARTZ, DK ;
STEINBERG, S ;
ISRAELACHVILI, J ;
ZASADZINSKI, JAN .
PHYSICAL REVIEW LETTERS, 1992, 69 (23) :3354-3357
[24]   Mechanisms and kinetics of self-assembled monolayer formation [J].
Schwartz, DK .
ANNUAL REVIEW OF PHYSICAL CHEMISTRY, 2001, 52 :107-137
[25]   Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines [J].
Srinivasan, U ;
Houston, MR ;
Howe, RT ;
Maboudian, R .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1998, 7 (02) :252-260
[26]  
THORSTEN B, 2003, SURF SCI, V532, P963
[27]   INCORPORATION OF PHENOXY GROUPS IN SELF-ASSEMBLED MONOLAYERS OF TRICHLOROSILANE DERIVATIVES - EFFECTS ON FILM THICKNESS, WETTABILITY, AND MOLECULAR-ORIENTATION [J].
TILLMAN, N ;
ULMAN, A ;
SCHILDKRAUT, JS ;
PENNER, TL .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1988, 110 (18) :6136-6144
[28]   Formation and structure of self-assembled monolayers [J].
Ulman, A .
CHEMICAL REVIEWS, 1996, 96 (04) :1533-1554
[29]  
ULMAN A, 1991, INTRO ULTRA THIN ORG
[30]   Investigation of the formation and structure of self-assembled alkylsiloxane monolayers on silicon using in situ attenuated total reflection infrared spectroscopy [J].
Vallant, T ;
Kattner, J ;
Brunner, H ;
Mayer, U ;
Hoffmann, H .
LANGMUIR, 1999, 15 (16) :5339-5346