Thermal flow sensor for liquids and gases based on combinations of two principles

被引：150

作者：

Ashauer, M ^{[1
]}

Glosch, H ^{[1
]}

Hedrich, F ^{[1
]}

Hey, N ^{[1
]}

Sandmaier, H ^{[1
]}

Lang, W ^{[1
]}

机构：

[1] Hahn Schickard Gesellsch, Inst Micromachining & Informat Technol, D-78052 Villingen Schwenningen, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1999年 / 73卷 / 1-2期

关键词：

anemometer; thermal flow sensor; thermal time-of-flight;

D O I：

10.1016/S0924-4247(98)00248-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new type of a flow sensor is presented which is based on a thermal principle. The combination of two detecting methods results both in a considerable increase in measuring range (0.1 to 150 mm/s) and in a shorter reaction time of less than 2 ms. Furthermore, the sensor is relatively insensitive to pollution. Devices were manufactured and successfully tested for liquids and gases. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：7 / 13

页数：7

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