A LIQUID VELOCITY SENSOR-BASED ON THE HOT-WIRE PRINCIPLE

被引：26

作者：

VANDERWIEL, AJ ^{[1
]}

LINDER, C ^{[1
]}

DEROOIJ, NF ^{[1
]}

BEZINGE, A ^{[1
]}

机构：

[1] ASCOM MICROELECTR,CH-2022 BEVAIX,SWITZERLAND

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1993年 / 37-8卷

关键词：

D O I：

10.1016/0924-4247(93)80117-Y

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on modeling and characterization of a silicon liquid velocity sensor fabricated by using an industrial bipolar process combined with micromachining. For applications in the biomedical field, miniature sensors are needed for measuring flow velocities in the range up to 2 m/s. In order to measure such small velocities, we have developed a sensor which is sensitive to variations of a forced heat flow modulated by the liquid velocity. As a large temperature gradient will change the properties of biological liquids, this sensor uses small temperature differences of about 1 to 10-degrees-C. A high average sensitivity of 10 mV/(m/s) has been measured. The overall dimensions of the chip are 2.0 mm x 1.6 mm x 0.4 mm.

引用

页码：693 / 697

页数：5

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