MONOLITHIC PRESSURE-FLOW SENSOR

被引：14

作者：

TABATA, O ^{[1
]}

INAGAKI, H ^{[1
]}

IGARASHI, I ^{[1
]}

机构：

[1] TOYOTA CENT RES & DEV LABS INC,ELECTR & INSTRUMENTAT RES DIV 3,NAGOYA,AICHI 48011,JAPAN

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1987年 / 34卷 / 12期

关键词：

D O I：

10.1109/T-ED.1987.23335

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：2456 / 2462

页数：7

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