FAST-RESPONSE SILICON FLOW SENSOR WITH AN ON-CHIP FLUID TEMPERATURE SENSING ELEMENT

被引：33

作者：

TABATA, O

机构：

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1986年 / 33卷 / 03期

关键词：

D O I：

10.1109/T-ED.1986.22495

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：361 / 365

页数：5

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