Thermal oxidation of cleft surface of InSe single crystal

被引:33
作者
Balitskii, OA [1 ]
Lutsiv, RV [1 ]
Savchyn, VP [1 ]
Stakhira, JM [1 ]
机构
[1] Lviv Ivan Franko State Univ, Dept Phys, UA-290005 Lviv, Ukraine
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1998年 / 56卷 / 01期
关键词
cleft surface; In2O3; InSe; layer semiconductors; phase formation; thermal oxidation;
D O I
10.1016/S0921-5107(98)00213-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The thermal oxidation processes of cleft surface of InSe single crystals in the temperature range from 200 to 615 degrees C have been investigated. We used the cathodoluminescence and X-ray diffraction methods. We established that adsorption processes were activated and defect creation on the cleft InSe surface begun at the low temperatures. The formation of In2Se3 and In-2(SeO4)(3) phases took place at medium temperatures. In2O3 phase was formed at high temperatures. Results are in good agreement with the In-Se-O phase diagram that generally includes the In-2(SeO4)(3) phase formation. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:5 / 10
页数:6
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