Electron interactions with C3F8

被引：56

作者：

Christophorou, LG ^{[1
]}

Olthoff, JK ^{[1
]}

机构：

[1] NIST, Div Elect, Elect & Elect Engn Lab, Gaithersburg, MD 20899 USA

来源：

JOURNAL OF PHYSICAL AND CHEMICAL REFERENCE DATA | 1998年 / 27卷 / 05期

关键词：

C3F8; cross sections; electron attachment; electron collisions; electron transport; perfluoropropane; scattering;

D O I：

10.1063/1.556024

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

To aid the many and diverse applications for which perfluoropropane (C3F8) is suited, we critically evaluate and synthesize existing knowledge on electron scattering and electron energy-loss processes for the C3F8 molecule, and provide recommendations for the most reliable data. We also draw attention to electron-interaction data that are not presently available, but are needed for modeling the behavior of C3F8 in practical uses, especially plasma processing. (C) 1998 American Institute of Physics and American Chemical Society. [S0047-2689(98)00205-0].

引用

页码：889 / 913

页数：25

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