Electrochemical machining of stainless steel microelements with ultrashort voltage pulses

被引：94

作者：

Kirchner, V ^{[1
]}

Cagnon, L ^{[1
]}

Schuster, R ^{[1
]}

Ertl, G ^{[1
]}

机构：

[1] Max Planck Gesell, Fritz Haber Inst, D-14195 Berlin, Germany

来源：

APPLIED PHYSICS LETTERS | 2001年 / 79卷 / 11期

关键词：

D O I：

10.1063/1.1401783

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An electrochemical pulse technique enables the fabrication of three-dimensional microelements from stainless steel. The method is based on the application of ultrashort (nanosecond) voltage pulses, whereupon electrochemical reactions are locally confined with submicrometer precision. Employing properly shaped tool electrodes enables the machining of freestanding cantilevers or microstructures directly to a metal sheet. Due to gentle removal of the material, the grain structure of the material is revealed without any chemical or mechanical modifications. This is demonstrated by measuring the vibration frequency of a cantilever, and agrees well with the value derived from the bulk material properties. (C) 2001 American Institute of Physics.

引用

页码：1721 / 1723

页数：3

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