共 21 条
[1]
ANDRA G, 2007, UNPUB 22 EUR PHOT SO
[5]
Effect of annealing temperature on structural and electrical properties of tantalum nitride thin film resistors deposited on SiO2/Si substrates by dc sputtering technique
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2006, 24 (02)
:682-685
[6]
Green MA, 2006, WORL CON PHOTOVOLT E, P15