Scanning near-field optical microscopy: transfer function and resolution limit

被引:9
作者
Blattner, P [1 ]
Herzig, HP [1 ]
Dandliker, R [1 ]
机构
[1] Univ Neuchatel, Inst Microtechnol, CH-2000 Neuchatel, Switzerland
关键词
scanning near-field optical microscope; rigorous diffraction theory; sub-wavelength resolution;
D O I
10.1016/S0030-4018(98)00401-5
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We present scanning near-field optical microscopy as an optical instrument characterized by a transfer function. This approach gives some theoretical guidelines for the design of near-field optical measurement systems. We emphasize that it is important to distinguish between the resolution for the optical field and the resolution for the object. In addition, to solve the general inverse diffraction problem the measurement of phase and amplitude of the electromagnetic field is necessary. (C) 1998 Published by Elsevier Science B.V. All rights reserved.
引用
收藏
页码:245 / 250
页数:6
相关论文
共 21 条
[1]   Evanescent interferometry by scanning optical tunneling detection [J].
Bainier, C ;
Courjon, D ;
Baida, F ;
Girard, C .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1996, 13 (02) :267-275
[2]   A PERTURBATIVE DIFFRACTION THEORY OF A MULTILAYER SYSTEM - APPLICATIONS TO NEAR-FIELD OPTICAL MICROSCOPY SNOM AND STOM [J].
BARCHIESI, D ;
VANLABEKE, D .
ULTRAMICROSCOPY, 1995, 57 (2-3) :196-203
[3]  
BLATTNER P, 1997, EOS TOP M DIFFR OPT, P36
[4]   Near-field phase measurement by Fourier analysis of the fringe pattern [J].
Charraut, D ;
Bainier, C ;
Courjon, D ;
Girard, C .
PURE AND APPLIED OPTICS, 1997, 6 (05) :491-502
[5]   DIRECT SOLUTION TO THE INVERSE SCATTERING PROBLEM FOR SURFACES FROM NEAR-FIELD INTENSITIES WITHOUT PHASE RETRIEVAL [J].
GARCIA, N ;
NIETOVESPERINAS, M .
OPTICS LETTERS, 1995, 20 (09) :949-951
[6]   Near-field optics theories [J].
Girard, C ;
Dereux, A .
REPORTS ON PROGRESS IN PHYSICS, 1996, 59 (05) :657-699
[7]  
Goodman J.W., 1996, Opt. Eng, V35, P1513, DOI DOI 10.1016/J.APSUSC.2017.08.033
[8]   SURFACE PROFILE RECONSTRUCTION USING NEAR-FIELD DATA [J].
GREFFET, JJ ;
SENTENAC, A ;
CARMINATI, R .
OPTICS COMMUNICATIONS, 1995, 116 (1-3) :20-24
[9]   HOMOGENEOUS AND EVANESCENT CONTRIBUTIONS IN SCALAR NEAR-FIELD DIFFRACTION [J].
KOWARZ, MW .
APPLIED OPTICS, 1995, 34 (17) :3055-3063
[10]   A MODAL-ANALYSIS OF LAMELLAR DIFFRACTION GRATINGS IN CONICAL MOUNTINGS [J].
LI, L .
JOURNAL OF MODERN OPTICS, 1993, 40 (04) :553-573