Phase-only micromirror array fabricated by standard CMOS process

Smart, phase-only modulation micromirror arrays have been implemented through a commercial CMOS service. The novel, two-dimensional array of deflectable microminors with integrated CMOS switching circuits and piezoresistive deflection sensors on flexures is presented in this paper. The individual mirror pixel is capable of modulating light in the visible to near-infrared spectrum by piston-like movement of a trampoline-type suspended micromirror driven by thermal multi-morph actuators. A flip-chip bonding technology is used to integrate the micromirror array with a microlens array to increase the optical fill factor of the hybrid system. Analytical and finite element models verified by experiments were developed to predict and model electro-thermo-mechanical behavior of micromirror. The 2.5 mrad beam steering angle was successfully demonstrated. (C) 2001 Elsevier Science B.V. All rights reserved.