Structural changes in poly(methyl methacrylate) during deep-etch X-ray synchrotron radiation lithography .2. Radiation effects on PMMA

The irradiation of poly(methyl methacrylate) changes the chemical constitution of the polymer. In addition to a decrease in molar mass further radiation-induced radical reactions cause changes in the chemical constitution of the polymer. Analysis of the reaction products shows that formation of long-chain branching can be excluded. Along with degradation of the chain lengths, ester groups in the side chains are attacked. The result is a modified polymer with a physical and chemical behaviour different from that of the starting polymer.