Stability and reliability of capacitive-type relative humidity sensors using crosslinked polyimide films

被引：82

作者：

Matsuguch, M

Kuroiwa, T

Miyagishi, T

Suzuki, S

Ogura, T

Sakai, Y

机构：

[1] Ehime Univ, Fac Engn, Dept Appl Chem, Matsuyama, Ehime 7908577, Japan

[2] Yamatake Co Ltd, Fujisawa, Kanagawa 2510015, Japan

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1998年 / 52卷 / 1-2期

关键词：

humidity sensor; electrical capacitance; crosslinked polyimide;

D O I：

10.1016/S0925-4005(98)00255-X

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Newly developed crosslinked polyimide and fluorinated polyimide-based humidity sensors were fabricated for office building and factory applications. Both sensors showed good initial sensor performance. The stability and the reliability of these sensors were evaluated by exposing the sensor elements to various test conditions. The crosslinked polyimide sensor was resistant to chemicals and the crosslinked fluorinated polyimide one exhibited long-term stability in harsh environments. By using these sensors properly, their sensor performance is superior to that of most commercially available capacitive-type sensors. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：53 / 57

页数：5

共 11 条

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